• I、Product Introduction

    This equipment is a horizontal double door high-temperature vacuum furnace, which is mainly used for high-temperature reaction and collection of Silicon monoxide, and also has the function of the general high-temperature atmosphere furnace. The equipment is composed of furnace body, furnace door locking device, heating unit, charging and venting unit, vacuum unit, control unit, coolant unit voltage transformer and cable.

     

    II、Product Features

    1. Horizontal double door structure is adopted, which makes it easier to take and place materials;

    2. Adopt high-purity graphite heating element and graphite felt insulation layer, with stable structure and high heating efficiency;

    3. There are two structures of single chamber and double chamber heating. In the double chamber heating design structure, there is a transition chamber between the two chambers, which is convenient to adjust the temperature gradient of the two chambers, facilitate process exploration and deposition of silicon oxide;

    4. High vacuum diffusion unit, roots pump unit, slide valve pump unit and other vacuum systems are optional, with high vacuum degree;

    5. It is equipped with a charging and discharging system, which can quickly complete the replacement of the internal environment of the cavity in combination with the vacuum system. The customized vacuum / atmosphere environment ensures that the heating element works in a better environment and completes the sample sintering better;

    6. Humanized configuration, which can be realized multiple choices of manual operation and intelligent operation;

    7. One furnace can be used for multi-purpose, as a simple vacuum sintering furnace or an atmosphere sintering furnace;

    8. Multiple visual system and safety interlock system, which can protect the normal operation of the equipment in real time;

    9.This product accepts non-standard customization.

    III、Product Parameters

    Type

    JYZG1-6DG

    Specifications

    1600℃-Φ400×400mm-30

    Heating power (kW)

    60KW

    Heating zone sizing

    Φ400×400mm

    Heating temperature(℃)

    1600℃

    Temperature control

    B-type thermocouple

    Cold limit vacuum degree (Pa)

    6.67*10-3Pa(cold state, empty furnace, after heating and degassing)

    Collection Area (L)

    60L

    Heating element

    Graphite heating

    control accuracy

    ±1℃

    heating rate

    0~15℃

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