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I、Equipment Introduction
This equipment is a horizontal high-temperature graphitization furnace, which is a specialized equipment for graphitization processes such as graphene heat dissipation film and PI film. It also has the function of using a general high-temperature atmosphere furnace. The equipment consists of a furnace body, intermediate frequency heating system, charging and discharging system, vacuum system, electrical control system, water cooling system, etc.
II、Equipment advantages
1.Intermediate frequency heating system: The heating system uses IGBT intermediate frequency power supply for induction heating. The sensors are arranged in a square spiral shape, with a total of three coils fixed inside the furnace body through support seats. The graphite crucible of the inductor is processed with high-purity graphite and composed of splicing, which has the advantages of high purity, no volatilization, and effectively ensuring the cleanliness of the furnace chamber. Graphite soft felt has good temperature resistance, impact resistance, and can withstand high temperatures of 3000 degrees. The intermediate frequency power supply adopts an IGBT intermediate frequency power supply system, which saves about 15-20% energy compared to traditional KGPS power supply, has an electrical efficiency of over 95%, less high harmonics, less pollution to the power grid, and will not interfere with the operation of other equipment in the power grid.
2.Design of inflation and deflation system: This device is equipped with an automatic inflation and deflation system, consisting of a flow meter, solenoid valve, hand valve, pressure sensor, connector, etc. A closed-loop control system is formed by pressure sensors and solenoid valves, which can control the atmosphere pressure inside the furnace. When the furnace pressure exceeds the set value, the exhaust valve automatically opens for pressure relief. The hand valve can adjust the gas flow appropriately according to the actual situation. At the same time, adding an appropriate amount of inert gas can adjust the vacuum atmosphere inside the furnace.
3.Electrical control system: The electrical control system consists of touch screen, electrical cabinet, contactor, transformer, temperature control meter, indicator light, PLC and other components. The main brand is Schneider grade brand, and the temperature control meter adopts European brand programmable intelligent temperature adjustment instruments, with a temperature control accuracy of ± 1 ℃. It has functions such as PID adjustment, over temperature alarm, broken couple indication, and temperature compensation.
III、Technical Parameter
Equipment model | JYZF1-10FR-P |
Equipment specifications | 3000℃-600*600*2000 |
power supply | AC 380V ± 10%, 50Hz/60Hz |
Total power | 500KW |
Pressure rise rate | <5Pa/h |
Temperature uniformity | After 30 minutes of insulation, ≤± 15 ℃ |
Extreme vacuum degree | 100Pa (empty furnace, cold state) |
Temperature control accuracy | ± 1 ℃ |
Detection unit | Pressure sensor, mechanical pressure gauge |